APA

Nishi Yoshio, Doering Robert & Wooldridge Tim. (2000). Handbook of semiconductor manufacturing technology. New York: Marcel Dekker.

Chicago

Nishi Yoshio, Doering Robert and Wooldridge Tim. 2000. Handbook of semiconductor manufacturing technology. New York: Marcel Dekker.

Harvard

Nishi Yoshio, Doering Robert and Wooldridge Tim. (2000). Handbook of semiconductor manufacturing technology. New York: Marcel Dekker.

MLA

Nishi Yoshio, Doering Robert and Wooldridge Tim. Handbook of semiconductor manufacturing technology. New York: Marcel Dekker. 2000.