Microelectronic materials and processes proceedings of the NATO Advanced Study Institute on., Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986 /
Proceedings of the NATO Advanced Study Institute on Microelectronic materials and processes
edited by R. A. Levy.
- Dordrecht ; Boston ; London Kluwer Academic Publishers, 1989.
- XIV, 985 stron : ilustracje ; 25 cm.
- NATO ASI Series. Series E, Applied Sciences ; Vol. 164 .