TY  - BOOK
AU  - Levy R.A.
ED  - Kluwer Academic Publishers (Dordrecht).
TI  - Microelectronic materials and processes: proceedings of the NATO Advanced Study Institute on., Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986 
T2  - NATO ASI Series. Series E, Applied Sciences
SN  - 0792301471
SN  - 0194-1895
PY  - 1989///
CY  - Dordrecht, Boston, London
PB  - Kluwer Academic Publishers
N1  - Bibliografia przy referatach. Indeks
ER  -