Handbook of semiconductor manufacturing technology / 
ed. by Yoshio Nishi, Robert Doering, assistant editor Tim Wooldridge. 
 - New York ;  Basel :  Marcel Dekker,  2000. 
 - XIV, 1157 s. :  il. ;  29 cm. 
<br/><br/>Bibliogr. przy rozdz. 
<br/><br/><label>ISBN: </label>0824787838 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Półprzewodniki
<br/><br/><label>Universal Decimal Class. No.: </label>621.315.59