Nanotechnology :  integrated processing systems for ultra-precision and ultra-fine products / 
edited by Norio Taniguchi. 
 - Oxford [etc]. :  Oxford University Press,  1996. 
 - XIV, [1], 406 s. :  il. ;  25 cm. 
 - Oxford Science Publications .
 - Oxford Science Publications .
<br/><br/>Bibliogr. przy rozdz. Indeks. 
<br/><br/><label>ISBN: </label>0198562837 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnologia.