TY - BOOK AU - Taniguchi,Norio ED - Oxford University Press. TI - Nanotechnology: integrated processing systems for ultra-precision and ultra-fine products T2 - Oxford Science Publications SN - 0198562837 PY - 1996/// CY - Oxford [etc]. PB - Oxford University Press KW - Nanotechnologia KW - kaba N1 - Bibliogr. przy rozdz. Indeks ER -